How to Perform High-Sensitivity EDS Mapping of Nanoscale Features with Ultim Extreme Infinity

In this webinar, Lucia Spasevski, Product Manager for high-end EDS detectors, demonstrates how Ultim Extreme Infinity extends the capabilities of SEM-based EDS through highly sensitive elemental analysis of nanoscale features at very low accelerating voltages. Using a semiconductor device cross section as an example, she shows how Ultim Extreme Infinity provides the sensitivity required to characterise transistor structures and investigate factors that can affect semiconductor device performance.

Watch this video to learn:

• How to collect EDS spectra and elemental maps in a guided workflow
• How to move from large-area sample overview to nanoscale feature analysis
• How Ultim Extreme Infinity enables high-resolution imaging and chemical characterisation without compromising sensitivity