Etch and Deposition for the High Volume Production of Reliable VCSEL Devices

The applications and market share of Vertical Cavity Surface Emitting Lasers (VCSELs) are growing, with increasing demand for ‘high tech’ applications such as facial recognition in smartphones, LiDAR (Light Detection and Ranging), and data transfer. Precise control of manufacturing, from the epitaxy to designing contacts, is essential to achieve the targeted electrical and optical characteristics of a VCSEL.

In this webinar, based on our experience in nanofabrication and plasma processing solutions, we discuss key etching and deposition steps in the manufacture of reliable VCSEL devices including the production of an effective hard mask and accurate and repeatable mesa etching.