Scanning Capacitance Microscopy

Scanning Capacitance Microscopy (SCM) is a powerful electrical characterization technique with broad applicability across a variety of fields such as semiconductors, failure analysis, and 2D materials.  Oxford Instrument's SCM module is 10× higher in resolution and speed compared to other SCM modules.  See SCM in action as we scan an SRAM sample with our Jupiter Discovery AFM, showing images of Capacitance, dC/dV Amplitude, and dC/dV Phase.